An inverse synthetic aperture radar (ISAR) high-precision compensation method is proposed based on coherent processing of intermediate frequency direct sampling data. First, the compensation of high-speed movement is performed by a modified linear frequency modulation matched filter during the pulse compression. The motion trajectory in the down-range direction is then reconstructed by compensation of window sampling difference of each pulse. Modified envelope correlation is applied to calculate the range profile shift between each pulse and the first one. Polynomial fitting is adopted to accurately estimate the motion characteristics. Subsequently, coherent processing is applied by combining range alignment and initial phase compensation. The migration through range cells correction can be then realized by keystone transform to the highly coherent data. Consequently, ISAR images with high quality are achieved. Experimental results on simulated and real data have demonstrated the validity of the proposed method.