|
Microscopic 3-D shape measurement can supply accurate metrology of the delicacy and complexity of MEMS components of the final devices to ensure their proper performance. Fringe projection profilometry (FPP) has the advantages of noncontactness and high accuracy, making it widely used in 3-D measurement. Recently, tremendous advance of electronics development promotes 3-D measurements to be more accurate and faster. However, research about real-time microscopic 3-D measurement is still rarely reported. In this work, we effectively combine optimized binary structured pattern with number-theoretical phase unwrapping algorithm to realize real-time 3-D shape measurement. A slight defocusing of our proposed binary patterns can considerably alleviate the measurement error based on phase-shifting FPP, making the binary patterns have the comparable performance with ideal sinusoidal patterns. Real-time 3-D measurement about 120 frames per second (FPS) is achieved, and experimental result of a vibrating earphone is presented.
|
