Research on the fast calibration method of MEMS gyroscope

Hongxiang Han; Jun Fu; Duanyang Gao

doi:10.1117/12.2505175

31 August 2018 Research on the fast calibration method of MEMS gyroscope

Hongxiang Han, Jun Fu, Duanyang Gao

Proceedings Volume 10835, Global Intelligence Industry Conference (GIIC 2018); 108351G (2018) https://doi.org/10.1117/12.2505175
Event: Global Intelligent Industry Conference 2018, 2018, Beijing, China

Abstract

Error calibration is an effective way to improve the measuring accuracy of MEMS Gyroscope, and the scale factor is the key parameter in it. In order to test the scale factor of various MEMS Gyroscopes and make effective evaluation, the thesis put forwards a fast test method of scale factor on the basis of National Metrology Technical Specification JJF 1535-2015 (MEMS Gyroscope Calibration Specification). First of all, it analyzes the cause of scale factor error and establish the corresponding error calibration model. Secondly, it designs the speed calibration experiment in the range of [-160 degree /s, 160 degree /s] angular rate. In view of the miscellaneous data acquisitive operation in the National Metrology Technical Specification, a rapid test method of scale factor is proposed by reasonable reduction of rate calibration points. In the end, it selects three different types of STIM 300, MTI100 and 3DM-GX4-25 to do experiment. The results show that the method proposed in this thesis is basically consistent with the results of National Metrology Technical Specification, and the workload of data acquisition is reduced by half, thus the rapid test of scale factors is realized.

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Hongxiang Han, Jun Fu, and Duanyang Gao "Research on the fast calibration method of MEMS gyroscope", Proc. SPIE 10835, Global Intelligence Industry Conference (GIIC 2018), 108351G (31 August 2018); https://doi.org/10.1117/12.2505175

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KEYWORDS

Gyroscopes

Calibration

Microelectromechanical systems

Error analysis

Data processing

Metrology

Data acquisition

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