Faster, better, cheaper metrology of lobster-eye (square-pore) optics

Thomas H. K. Irving; Andrew G. Peele; Keith A. Nugent; Steven P. Brumby

doi:10.1117/12.411639

5 January 2001 Faster, better, cheaper metrology of lobster-eye (square-pore) optics

Thomas H. K. Irving, Andrew G. Peele, Keith A. Nugent, Steven P. Brumby

Proceedings Volume 4145, Advances in X-Ray Optics; (2001) https://doi.org/10.1117/12.411639
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Lobster-eye optics have attracted much attention and effort in recent years due to their unique x-ray focusing capabilities. While many advances have been made in the manufacture and analysis of these optics, their characterization and the determination of their metrology remains constrained by the shortcomings of current techniques. We present a faster, better and cheaper method for the determination of many of the metrological parameters of lobster-eye optics. Optical images of the entrance and exit surfaces of an optic are taken. Applying our technique to these images allows measurement of all the geometrical properties that previously have been found to be the major contributors to focusing defects. In addition, the number of free parameters required in fitting a simulated to a measured x-ray image can be greatly reduced. We present results for the characterization of an existing lobster-eye optic and the improved modeling thereby obtained which are in very good agreement with experimental x-ray focusing data.

Citation Download Citation

Thomas H. K. Irving, Andrew G. Peele, Keith A. Nugent, and Steven P. Brumby "Faster, better, cheaper metrology of lobster-eye (square-pore) optics", Proc. SPIE 4145, Advances in X-Ray Optics, (5 January 2001); https://doi.org/10.1117/12.411639

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