Grating displacement sensor in which the grating line is subdivided directly by CCD instead of subdividing the moire fringes

ShuRong He; Zongyang Xiao; Zhuang He

doi:10.1117/12.402570

9 October 2000 Grating displacement sensor in which the grating line is subdivided directly by CCD instead of subdividing the moire fringes

ShuRong He, Zongyang Xiao, Zhuang He

Author Affiliations +

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402570
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Different from the traditional way of subdividing the moire fringe that needs complex subsequent circuits, we adopt a linear CCD array to subdivide the grating line directly. Because of the CCD's high sensitivity, consistency and the amount of pixels, the interval between two neighboring lines of the grating can be measured and the subdivision factor is up to thousands of times. Therefore, our device can attain high resolution with limited cost. The circuit is also much simpler than before since CCD driver itself completes the subdividing and digitizing functions. The practical device's precision is better than 0.1 micrometers and the linearity is better than 0.99.

Citation Download Citation

ShuRong He, Zongyang Xiao, and Zhuang He "Grating displacement sensor in which the grating line is subdivided directly by CCD instead of subdividing the moire fringes", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402570

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