Research on the 1D PSD

Xiangqun Cao; Bin Lin; Meizhen Huang; Xuming Wu; Yuqing Chen

doi:10.1117/12.471904

20 September 2002 Research on the 1D PSD

Xiangqun Cao, Bin Lin, Meizhen Huang, Xuming Wu, Yuqing Chen

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.471904
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Position Sensitive Detector (PSD) is a device utilizing the lateral photoelectric that produced by the non-uniform illumination of a rectifying semiconductor junction. The linear requirement, spectral responds, position detection error of 1D PSD were presented in this paper. All these studied works are the theoretical basis for designing and fabrication PSD with excellent performance. The experimental results show that the rms non-linearity and the typcial position error are 0.1% of full length (8 mm) and ±5μm.

Citation Download Citation

Xiangqun Cao, Bin Lin, Meizhen Huang, Xuming Wu, and Yuqing Chen "Research on the 1D PSD", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.471904

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