Paper
20 September 2002 Tiny Gallium arsenide probe for electro-optic sampling
Hailan Li, Xiaoting Zhang, Zhanguo Chen, Gang Jia, Zhixiong Zhou
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Abstract
Several fabrication methods of electro-optic probe are introduced and the wet chemical etching technique is the most promising to fabricate a tiny probe. The experimental material is Gallium Arsenide crystal whose dielectric constant is small and stability is good. A pyramidal electro-optic probe has been achieved which whole size is smaller than conventional probes and surface is very smooth. So the influence of probe on the measured electric field can be reduced remarkably which will improve the measurement accuracy, and at the same time good spatial resolution would be obtained.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hailan Li, Xiaoting Zhang, Zhanguo Chen, Gang Jia, and Zhixiong Zhou "Tiny Gallium arsenide probe for electro-optic sampling", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.471195
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KEYWORDS
Gallium arsenide

Etching

Wet etching

Crystals

Electro optics

Spatial resolution

Fabrication

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