Prof. Miloslav Ohlídal Profile

Prof. Miloslav Ohlídal

Faculty of Mechanical Eng at Brno Univ of Technology

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 24 September 2015 Paper

Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films

Miloslav Ohlídal, Ivan Ohlidal, David Nečas, Jiří Vodák, Daniel Franta, Pavel Nádaský, František Vižd'a

Proceedings Volume 9628, 96280R (2015) https://doi.org/10.1117/12.2191052

KEYWORDS: Thin films, Intelligence systems, Reflectance spectroscopy, Spectroscopy, Reflectometry, Imaging spectroscopy, Reflectivity, Ellipsometry, CCD cameras, Spectroscopic ellipsometry

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Proceedings Article | 24 September 2015 Paper

Scattermeter for measurement of solar cells

Pavel Nádaský, Jakub Klus, Jiří Vodák, Štěpán Šustek, Miloslav Ohlídal

Proceedings Volume 9628, 96280P (2015) https://doi.org/10.1117/12.2190779

KEYWORDS: Solar cells, Sensors, Scatter measurement, Scattering, Electromagnetic scattering, Silicon, Mechanical engineering, Crystals, Solids, Signal detection

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Proceedings Article | 24 September 2015 Paper

Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

David Nečas, Ivan Ohlídal, Jiří Vodák, Miloslav Ohlídal, Daniel Franta

Proceedings Volume 9628, 96280C (2015) https://doi.org/10.1117/12.2190091

KEYWORDS: Intelligence systems, Spectroscopy, Reflectance spectroscopy, Imaging spectroscopy, Gallium arsenide, Refractive index, Data processing, Thin films, Spectroscopic ellipsometry, Atomic force microscopy

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A new optical characterization method based on imaging spectroscopic reflectometry (ISR) is presented and illustrated on the characterization of rough non-uniform epitaxial ZnSe films prepared on GaAs substrates. The method allows the determination of all parameters describing the thin films exhibiting boundary roughness and non-uniformity in thickness, i.e. determination of the spectral dependencies of the optical constants, map of local thickness and map of local rms values of heights of the irregularities for the rough boundaries. The local normal reflectance spectra in ISR correspond to small areas (37×37 μm²) on the thin films measured within the spectral range 270{900 nm by pixels of a CCD camera serving as the detector of imaging spectrophotometer constructed in our laboratory. To our experience the small areas corresponding to the pixels are sufficiently small so that the majority of the films can be considered uniform in all parameters within these areas. Boundary roughness is included into the reflectance formulas by means of the scalar diffraction theory (SDT) and the optical constant spectra of the ZnSe films were expressed by the dispersion model based on the parametrization of the joint density of electronic states (PJDOS). In general, there is a correlation between the searched parameters if the individual local reflectance spectra are fitted separately and, therefore, the local reflectance spectra measured for all the pixels are treated simultaneously using so called multi-pixel method in order to remove or reduce this correlation and determine the values of all the parameters with a sufficient accuracy. The results of the optical characterization of the same selected sample of the epitaxial ZnSe thin film obtained using the method presented here and combined method of variable-angle spectroscopic ellipsometry, spectroscopic reflectometry and single-pixel immersion spectroscopic reflectometry are introduced in the contribution as well.

Proceedings Article | 23 September 2015 Paper

Imaging spectroscopic reflectometer based on pellicle beamsplitter

J. Vodák, V. Čudek, P. Nádaský, M. Ohlídal

Proceedings Volume 9626, 96262L (2015) https://doi.org/10.1117/12.2190947

KEYWORDS: Reflectance spectroscopy, Pellicles, Beam splitters, Reflectometry, Imaging spectroscopy, Intelligence systems, Thin films, Spectroscopy, Cameras, Mirrors

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Proceedings Article | 6 December 2006 Paper

Digital two-wavelength holographic interference microscopy for surface roughness measurement

Miloslav Ohlídal, Ludek Šír, Miloš Jákl, Ivan Ohlídal

Proceedings Volume 5945, 59450I (2006) https://doi.org/10.1117/12.638915

KEYWORDS: Digital holography, Holograms, Surface roughness, Microscopes, Holography, Molybdenum, Beam splitters, 3D image reconstruction, Microscopy, CCD cameras

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Proceedings Article | 6 December 2006 Paper

Potentialities of optical profilometer MicroProf FRT for surface quality measurement

Kateřina Páleníkova, Miloslav Ohlídal

Proceedings Volume 5945, 594510 (2006) https://doi.org/10.1117/12.638927

KEYWORDS: Profilometers, Digital imaging, Semiconducting wafers, Quality measurement, Surface roughness, Silicon, Natural surfaces, Optical fibers, Silicon films, Spectroscopy

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Proceedings Article | 5 October 2005 Paper

Optical characterization of non-uniform thin films using imaging spectrophotometry

Miloslav Ohlídal, Vladimir Cudek, Ivan Ohlídal, Petr Klapetek

Proceedings Volume 5963, 596329 (2005) https://doi.org/10.1117/12.625380

KEYWORDS: Thin films, Refractive index, Spectrophotometry, Reflectivity, Gallium arsenide, CCD cameras, Reflectance spectroscopy, Mirrors, Spectroscopy, Reflectometry

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Proceedings Article | 14 February 2005 Paper

Optical measurement of mechanical stresses in diamond-like carbon films

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, Vladimir Cudek, Vilma Bursikova, Petr Klapetek, Milos Jakl

Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611744

KEYWORDS: Interferometry, Chromatic aberrations, Silicon, Thin films, Silicon films, Reflectance spectroscopy, Refractive index, Plasma enhanced chemical vapor deposition, Crystals, Spectroscopy

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Proceedings Article | 29 September 2004 Paper

Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, Vladimir Cudek, Vilma Bursikova, Martin Siler

Proceedings Volume 5527, (2004) https://doi.org/10.1117/12.562136

KEYWORDS: Silicon, Silicon films, Silicon carbide, Carbon, Chemical species, Spherical lenses, Crystals, Reflectance spectroscopy, Thin films, Methane

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Proceedings Article | 31 December 2003 Paper

Characterization of thin films nonuniform in optical parameters by spectroscopic digital reflectometry

Ivan Ohlidal, Miloslav Ohlidal, Petr Klapetek, Vladimir Cudek, Milos Jakl

Proceedings Volume 5182, (2003) https://doi.org/10.1117/12.509628

KEYWORDS: Refractive index, Thin films, Reflectance spectroscopy, Reflectivity, Reflectometry, Silicon films, Spectroscopy, CCD cameras, Silicon, Optical spectroscopy

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Proceedings Article | 21 November 2003 Paper

Autocorrelation function of the sum of two spectrally decorrelated laser speckle fields: comparison of Fresnel and Fraunhofer approximation

Dominik Prazak, Miloslav Ohlidal

Proceedings Volume 5259, (2003) https://doi.org/10.1117/12.545104

KEYWORDS: Speckle, Laser scattering, Scattering, CCD cameras, Fourier transforms, Atomic force microscope, Laser metrology, Mechanical engineering, Surface roughness, Profilometers

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Proceedings Article | 19 November 2003 Paper

Surface roughness determination by digital laser speckle spectral correlation: Fresnel approximation of scalar Kirchhoff theory

Miloslav Ohlidal, Dominik Prazak

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.525511

KEYWORDS: Speckle, Surface roughness, Laser scattering, Scattering, Light scattering, CCD cameras, Metrology, Photodetectors, Fourier transforms, Laser optics

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Proceedings Article | 7 March 2001 Paper

Laser speckle spectral correlation and surface roughness

Dominik Prazak, Miloslav Ohlidal

Proceedings Volume 4356, (2001) https://doi.org/10.1117/12.417850

KEYWORDS: Speckle, Surface roughness, Laser scattering, Scattering, Light scattering, Electromagnetic scattering, Electromagnetic scattering theory, Metrology, Mechanical engineering, Electromagnetic radiation

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Proceedings Article | 19 July 1999 Paper

Optical characterization of multilayer systems with randomly rough boundaries

Ivan Ohlidal, Frantisek Vizd'a, Miloslav Ohlidal

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.355053

KEYWORDS: Multilayers, Reflectivity, Refractive index, Thin films, Systems modeling, Glasses, Solid state physics, Physics, Tin, Statistical analysis

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Proceedings Article | 14 July 1999 Paper

Comparison of optical and nonoptical methods for measuring surface roughness

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, Miroslav Tykal

Proceedings Volume 3820, (1999) https://doi.org/10.1117/12.353100

KEYWORDS: Surface roughness, Silicon, Profilometers, Interferometry, Reflectivity, Statistical analysis, Light scattering, Near field optics, Spectrophotometry, Microscopes

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Proceedings Article | 19 August 1996 Paper

Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, A. Michalek

Proceedings Volume 2775, (1996) https://doi.org/10.1117/12.246771

KEYWORDS: Glasses, Diffusers, Interferometry, Microscopes, Image processing, Statistical analysis, CCD cameras, Solids, Image analysis, Fourier transforms

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SPIE Journal Paper | 1 June 1995

Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries

Ivan Ohlidal, Frantisek Vizd'a, Miloslav Ohlidal

OE, Vol. 34, Issue 06, (June 1995) https://doi.org/10.1117/12.10.1117/12.203111

KEYWORDS: Reflectivity, Gallium arsenide, Oxides, Contrast transfer function, Thin films, Reflectance spectroscopy, Refractive index, Silicon, Glasses, Data modeling

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