PROCEEDINGS VOLUME 4981
MICROMACHINING AND MICROFABRICATION | 25-31 JANUARY 2003
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 27 Papers, 0 Presentations, 0 Posters
Session 1  (3)
Session 2  (3)
Session 3  (4)
Session 4  (4)
Session 5  (5)
Session 6  (6)
MICROMACHINING AND MICROFABRICATION
25-31 January 2003
San Jose, CA, United States
Session 1
Christopher D. Nordquist, Arnoldo Muyshondt, Michael V. Pack, Patrick S. Finnegan, Christopher W. Dyck, Isak C. Reines, Garth M. Kraus, George R. Sloan, Charles T. Sullivan
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.480768
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.472873
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.479560
Session 2
Cornelis P. van Dam, Dora Yen Nakafuji, Candice Bauer, Kevin Standish, David Chao
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.478170
Matthew Moorman, Ronald P. Manginell, Christopher W. Colburn, Deborah L. Mowery-Evans, Paul G. Clem, Nelson S. Bell, Lawrence F. Anderson
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476318
Paul Stanley, Krishnan Venkatakrishnan, Bryan Kok Ann Ngoi
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.478173
Session 3
Jiri Marek, Matthias Illing
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.480769
Hans Artmann, Frank Schaefer, Gerhard Lammel, Simon Armbruster, Hubert Benzel, Christoph Schelling, Heribert Weber, Heinz-Georg Vossenberg, Ronald Gampp, et al.
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.479564
Mike Becker, Wolfgang Benecke, Birgit Hannemann, Thomas Henning
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476281
Proyag Datta, Madhulika Sathe, Lakshmi Namburi, Elizabeth J. Podlaha, Sumanta Acharya, Michael C. Murphy
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.472869
Session 4
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476315
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476282
Mary J. Li, Alex Bier, Rainer K. Fettig, David E. Franz, R. Hu, T. King, Alexander S. Kutyrev, Bernard A. Lynch, Samuel Harvey Moseley, et al.
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476285
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.478171
Session 5
Thomas Buck, Mathias Reimann, Markus Ulm, Roland Mueller-Fiedler, Juergen Seidel, Erich Kasper, Claus Schoellhorn, Stefan Haak
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.479563
Bachar Affour, Patrick Giroud, Firas Mohamed
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476284
Christopher L. Chua, David K. Fork, Koenraad Van Schuylenbergh, Jeng-Ping Lu
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.472875
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.473375
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.479562
Session 6
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.479561
Trent Huang, Erik Nilsen, Matt Ellis, Kabseog Kim, Ken Tsui, George D. Skidmore, Chuck Goldsmith, Arunkumar Nallani, Jeong-Bong Lee
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476319
Gary D. Gray, Matthew J. Morgan, Paul A. Kohl
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.478172
Wei Ma, Yitshak Zohar, Man Wong
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.478285
Nikolay Ivanovich Mukhurov, Georgy I. Efremov, Vyacheslav Kovalevsky
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.480767
Poster Session
Chieh-Hsiao Wang, Robert J. Weber
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.476283
Runzi Chang, Min She
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.472877
Session 6
Christopher W. Dyck, Thomas A. Plut, Christopher D. Nordquist, Garth M. Kraus, Gary D. Schmidt, Karl L. Gass, Patrick S. Finnegan, Isak C. Reines, Charles T. Sullivan
Proceedings Volume MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (2003) https://doi.org/10.1117/12.498237
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