Applications Of Laser Interferometry To Metrology

John O. Bumgarner

doi:10.1117/12.954395

20 October 1975 Applications Of Laser Interferometry To Metrology

John O. Bumgarner

Proceedings Volume 0060, Solving Quality Control and Reliability Problems with Optics; (1975) https://doi.org/10.1117/12.954395
Event: Solving Quality Control and Reliability Problems with Optics, 1975, San Diego, United States

Abstract

Functional descriptions of laser interferometers are presented. The specific application of a Hewlett-Packard Interferometer to the evaluation of the x axis motion of a scanning microdensitometer is detailed. Results of the analysis are discussed. Extensions to some other areas of metrology are given.

Citation Download Citation

John O. Bumgarner "Applications Of Laser Interferometry To Metrology", Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); https://doi.org/10.1117/12.954395

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