Metrological Evaluation Of Grazing Incidence Mirrors

M. Stedman

doi:10.1117/12.933117

24 March 1982 Metrological Evaluation Of Grazing Incidence Mirrors

M. Stedman

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933117
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

The manufacture of grazing incidence X-ray mirrors must be accompanied by metrology at all stages of production. Traditional interferometric methods of measurement are less suited to grazing incidence optics than automated probes linked to computers. Stylus probes can be used at all stages of production, whereas non-contact optical probes are mainly useful at the final stages of polishing and figure adjustment. To characterize an X-ray mirror fully, the metrology must not only have high sensitivity, but also the ability to detect perturbations over a wide range of spatial frequencies.

Citation Download Citation

M. Stedman "Metrological Evaluation Of Grazing Incidence Mirrors", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933117

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