Wyko Systems For Optical Metrology

Katherine Creath

doi:10.1117/12.941760

23 March 1987 Wyko Systems For Optical Metrology

Katherine Creath

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941760
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

WYKO produces interferometer systems for a number of optical metrology applications. Systems to be discussed include: WISP, an interferogram analysis package that uses input from a graphics digitizing tablet or video camera; TOPO, a microscope system for profiling surfaces such as mirrors, hard disks, magnetic tape, and paint; SIRIS, used to test optical components ranging in size from a millimeter to meters; IR3, a 10.6 μm Twyman-Green interferometer for testing up to 16-in, diameter objects; LADITE, a wavefront analysis system whose major application is the testing of diode lasers; HOLOCAM, for quantitative holographic interferometry; and MAX, a projected fringe contouring system. All products but WISP use phase-measurement interferometry principles to obtain data. This paper gives the general operational principles of these systems and describes some of their applications and results.

Citation Download Citation

Katherine Creath "Wyko Systems For Optical Metrology", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941760

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