Strategies for the dynamical-optical simulation of high-performance optics

Johannes Störkle; Peter Eberhard

doi:10.1117/12.2199538

5 July 2016 Strategies for the dynamical-optical simulation of high-performance optics

Johannes Störkle, Peter Eberhard

Author Affiliations +

Proceedings Volume 10012, Integrated Modeling of Complex Optomechanical Systems II; 100120C (2016) https://doi.org/10.1117/12.2199538
Event: Integrated Modeling of Complex Optomechanical Systems II, 2015, Varenna, Italy

Abstract

In order to simulate and investigate the dynamical-optical behavior of high precision optics, integrated modeling strategies and methods are proposed within this work. For instance, this optical systems can be a telescope optic or a lithographic objective. In order to derive a simplified mechanical model for time simulations with low computational cost, the method of elastic multibody systems in combination with model order reduction methods can be used. For this, software-tools and interfaces are developed. Furthermore, mechanical and optical simulation models are derived and implemented. In order to clarify these methods, an academic mirror example is chosen and the influence of the model order reduction methods is analysed.

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Johannes Störkle and Peter Eberhard "Strategies for the dynamical-optical simulation of high-performance optics", Proc. SPIE 10012, Integrated Modeling of Complex Optomechanical Systems II, 100120C (5 July 2016); https://doi.org/10.1117/12.2199538

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