Aspheric and free-form surfaces test with non-null sub-aperture stitching

Dong Liu; Yuhao Zhou; Jian Bai; Tu Shi; Yibing Shen; Yongying Yang; Lei Zhang

doi:10.1117/12.2246149

31 October 2016 Aspheric and free-form surfaces test with non-null sub-aperture stitching

Dong Liu, Yuhao Zhou, Jian Bai, Tu Shi, Yibing Shen, Yongying Yang, Lei Zhang

Proceedings Volume 10021, Optical Design and Testing VII; 100210N (2016) https://doi.org/10.1117/12.2246149
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

A free-form surface sub-aperture stitching interferometry (FSSI) is proposed for aspheric and free-form surfaces testing. Different from normal annular and circular sub-aperture stitching method, non-null interferometric configuration and irregular sub-apertures are employed to make the best use of the resolved fringes. Meanwhile, a multi-aperture simultaneous reverse optimizing reconstruction (MSROR) process is proposed for full aperture figure error reconstruction. With the multi-configuration model, full aperture figure error would be extracted in form of Zernike polynomials from sub-apertures wavefront data by the MSROR method. This method concurrently accomplishes sub-aperture retrace error and misalignment correction, requiring neither complex mathematical algorithms, nor sub-aperture overlaps. The experiments show that, the aspheric annular sub-aperture stitching accuracy with the proposed FSSI is more than 1/50λ (rms) comparing with the result of ZYGO Verifier Asphere interferometer. The bi-conic surface sector sub-aperture stitching accuracy is about 1/ 50λ (rms) comparing with result of Taylor Hobson contourgraph in longitudinal section contour.

Citation Download Citation

Dong Liu, Yuhao Zhou, Jian Bai, Tu Shi, Yibing Shen, Yongying Yang, and Lei Zhang "Aspheric and free-form surfaces test with non-null sub-aperture stitching", Proc. SPIE 10021, Optical Design and Testing VII, 100210N (31 October 2016); https://doi.org/10.1117/12.2246149

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