Presentation + Paper
17 February 2017 Development of a scanner-based direct laser interference patterning optical head: new surface structuring opportunities
Tim Kunze, Christoph Zwahr, Benjamin Krupop, Sabri Alamri, Florian Rößler, Andrés Fabián Lasagni
Author Affiliations +
Abstract
Periodic surface structures with micrometer or submicrometer resolution produced on surfaces of different technological parts can be used to improve their mechanical, biological or optical characteristics. While direct laser interference patterning (DLIP) already permits structuring speeds of up to 0.9 m2/min under constant process parameters, fabrication of individualized surface structures fabricated "on-the-fly" is not possible at high speeds. In this study, a scanner-based DLIP optical head is presented which combines the flexibility of the DLIP technology with a high-performance galvanometer scanner system. An evaluation of the structuring results as well as various application examples will be presented.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tim Kunze, Christoph Zwahr, Benjamin Krupop, Sabri Alamri, Florian Rößler, and Andrés Fabián Lasagni "Development of a scanner-based direct laser interference patterning optical head: new surface structuring opportunities", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009214 (17 February 2017); https://doi.org/10.1117/12.2251745
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CITATIONS
Cited by 12 scholarly publications.
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KEYWORDS
Scanners

Head

Laser optics

Optical lithography

Nanolithography

Computer generated holography

Laser processing

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