Paper
10 March 1989 Effect Of Grating Positional Error On Moire Signal Contrast
Chang-ming Ma, Xing-qing Dai
Author Affiliations +
Proceedings Volume 1012, In-Process Optical Measurements; (1989) https://doi.org/10.1117/12.949335
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
This paper presents the effect of the positional error of metrological gratings on the contrast of Moire signals. The relationship between the positional error and the Moire fringe curvature has been discussed under different gap conditions. Theoretical expressions for the contrast of Moire signals have been deduced by means of geometrical approximation and diffraction principles. Agreement between the experimental results and the theoretical analysis is extremely good.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chang-ming Ma and Xing-qing Dai "Effect Of Grating Positional Error On Moire Signal Contrast", Proc. SPIE 1012, In-Process Optical Measurements, (10 March 1989); https://doi.org/10.1117/12.949335
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Moire patterns

Diffraction gratings

Fringe analysis

Optical testing

Signal detection

Signal processing

Diffraction

RELATED CONTENT


Back to Top