Using design differentiating methods to find suspect design patterns which cause failure

Yang Shen; Thomas Yang; Yifan Zhang; Jason Sweis; Ya-Chieh Lai

doi:10.1117/12.2259947

30 March 2017 Using design differentiating methods to find suspect design patterns which cause failure

Yang Shen, Thomas Yang, Yifan Zhang, Jason Sweis, Ya-Chieh Lai

Author Affiliations +

Proceedings Volume 10148, Design-Process-Technology Co-optimization for Manufacturability XI; 101481C (2017) https://doi.org/10.1117/12.2259947
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Systematic yield detractors are normally expected to be identified by ATPG test result diagnostics. Different test patterns have been designed to test different functions. Test diagnostics can identify failed functions so that product engineers, based on testing results, can narrow down which block in the design performs this function. However, it is often hard to narrow down to a more specific region in a product.

This paper will present a working flow for using design diffing techniques to extract layout structures and perform a geometry analysis flow combined with testing results to find most probable suspects that may cause noticeable yield loss.

Citation Download Citation

Yang Shen, Thomas Yang, Yifan Zhang, Jason Sweis, and Ya-Chieh Lai "Using design differentiating methods to find suspect design patterns which cause failure", Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 101481C (30 March 2017); https://doi.org/10.1117/12.2259947

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