Development of an aerosol PZT actuator for a scanner system

Peng-Jyun Chen; Ting-Kai Lin; Wen-Jong Wu; David Schipf; Wei-Chih Wang

doi:10.1117/12.2259969

5 April 2017 Development of an aerosol PZT actuator for a scanner system

Peng-Jyun Chen, Ting-Kai Lin, Wen-Jong Wu, David Schipf, Wei-Chih Wang

Proceedings Volume 10170, Health Monitoring of Structural and Biological Systems 2017; 101700V (2017) https://doi.org/10.1117/12.2259969
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2017, Portland, Oregon, United States

Abstract

Piezo devices made of lead-zirconium-titanate (PZT) are known for driving mechanical device for positioning control and vibration actuation. Here we present a new rapid prototyped PZT actuator for potential 2D scanner application. The proposed 5-μm thick film PZT actuator is made by directly deposited on a thin 100 μm thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear vibration and frequency response. Fabrication results, electrical impedance and mechanical response will be presented and discussed.

Citation Download Citation

Peng-Jyun Chen, Ting-Kai Lin, Wen-Jong Wu, David Schipf, and Wei-Chih Wang "Development of an aerosol PZT actuator for a scanner system", Proc. SPIE 10170, Health Monitoring of Structural and Biological Systems 2017, 101700V (5 April 2017); https://doi.org/10.1117/12.2259969

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