Programmable differential capacitance-to-voltage converter for MEMS accelerometers

G. Royo; C. Sánchez-Azqueta; C. Gimeno; C. Aldea; S. Celma

doi:10.1117/12.2264784

31 May 2017 Programmable differential capacitance-to-voltage converter for MEMS accelerometers

G. Royo, C. Sánchez-Azqueta, C. Gimeno, C. Aldea, S. Celma

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 1024610 (2017) https://doi.org/10.1117/12.2264784
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.

Citation Download Citation

G. Royo, C. Sánchez-Azqueta, C. Gimeno, C. Aldea, and S. Celma "Programmable differential capacitance-to-voltage converter for MEMS accelerometers", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024610 (31 May 2017); https://doi.org/10.1117/12.2264784

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