Exploration of problems in the process of metallization of quartz

Xinqiang Cui; Xiangchao Guo; Jia Chen; Haibing Li

doi:10.1117/12.2266341

8 March 2017 Exploration of problems in the process of metallization of quartz

Xinqiang Cui, Xiangchao Guo, Jia Chen, Haibing Li

Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 1025511 (2017) https://doi.org/10.1117/12.2266341
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China

Abstract

Since the difference between the film and the quartz, there are problems in metallization process such as low bonding strength, poor wettability and the film stress; combined with the actual situation, carried out a series of exploration of the above problems, take different measures to solve the practical problems.

Citation Download Citation

Xinqiang Cui, Xiangchao Guo, Jia Chen, and Haibing Li "Exploration of problems in the process of metallization of quartz", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 1025511 (8 March 2017); https://doi.org/10.1117/12.2266341

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