Three-dimensional Dammann confocal microscopy

Changhe Zhou

doi:10.1117/12.2276581

26 June 2017 Three-dimensional Dammann confocal microscopy

Changhe Zhou

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032913 (2017) https://doi.org/10.1117/12.2276581
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Three-dimensional (3D) Dammann confocal microscopy is proposed based on introducing 3D Dammann gratings into traditional confocal microscopy. The conventional confocal microscopy usually has a single focal point. Using threedimensional Dammann gratings, it shows a new confocal microscopy which could obtain three-dimensional information of object, therefore, novel Dammann-based microscopy should be developed for practical applications.

Citation Download Citation

Changhe Zhou "Three-dimensional Dammann confocal microscopy", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032913 (26 June 2017); https://doi.org/10.1117/12.2276581

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