Open Access Presentation
20 September 2017 3D laser nanolithography (Conference Presentation)
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Abstract
Three-dimensional (3D) laser lithography has become a versatile, reliable, and widespread workhorse for fabricating 3D micro- and nanostructures. I will illustrate the current state-of-the-art by selected examples, including free-form micro-optics, 3D optical and other metamaterials, as well as functionalized 3D scaffolds for biological cell culture. I will speculate about near-term industrial applications and outline remaining technological challenges regarding spatial resolution, scalability, and multi-material 3D nano-printing.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martin Wegener "3D laser nanolithography (Conference Presentation)", Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 1035402 (20 September 2017); https://doi.org/10.1117/12.2276877
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