High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography

Shinya Nakajima; Satoshi Takei; Makoto Hanabata; Naoto Sugino; Takao Kameda; Yoko Matsumoto; Atsushi Sekiguchi

doi:10.1117/12.2273270

31 August 2017 High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography

Shinya Nakajima, Satoshi Takei, Makoto Hanabata, Naoto Sugino, Takao Kameda, Yoko Matsumoto, Atsushi Sekiguchi

Author Affiliations +

Proceedings Volume 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV; 103541B (2017) https://doi.org/10.1117/12.2273270
Event: SPIE Nanoscience + Engineering, 2017, San Diego, California, United States

Abstract

A cellulose-based gas permeable mold having thermal crosslinking group for nanoimprint lithography has been developed to prevent transcriptional defects by volatile solvents from nanoimprinting materials. 3 wt.% of thermal initiator was required for producing the cellulose-based gas permeable mold. The void on 10 μm line structure of imprinted UV crosslinked resin with acetone as volatile solvents in nanoimprint lithography process using non-gas permeable mold was significantly removed using the cellulose-based gas permeable mold due to its high oxygen gas permeability. The cellulosebased gas permeable mold allows the employment of solvent including imprinting materials such as compounds and alloy particle.

Citation Download Citation

Shinya Nakajima, Satoshi Takei, Makoto Hanabata, Naoto Sugino, Takao Kameda, Yoko Matsumoto, and Atsushi Sekiguchi "High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography", Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 103541B (31 August 2017); https://doi.org/10.1117/12.2273270

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available