Low cost ellipsometer using a standard commercial polarimeter

F. Velosa; M. Abreu

doi:10.1117/12.2271144

22 August 2017 Low cost ellipsometer using a standard commercial polarimeter

F. Velosa, M. Abreu

Proceedings Volume 10453, Third International Conference on Applications of Optics and Photonics; 1045305 (2017) https://doi.org/10.1117/12.2271144
Event: Third International Conference on Applications of Optics and Photonics, 2017, Faro, Portugal

Abstract

Ellipsometry is an optical technique to characterize materials or phenomena that occurs at an interface or thin film between two different media. In this paper, we present an experimental low-cost version of a photometric ellipsometer, assembled with commonly found material at every Optics laboratory. The polarization parameters measurement was performed using a Thorlabs PAX5710 polarimeter. The uncertainty computed using the Guide to the Expression of Uncertainty in Measurement (GUM) procedures. With the assembled ellipsometer we were able to measure the thickness of a 10 nm thick SiO₂ thin film deposited upon Si, and the complex refractive index of Gold and Tantalum samples. The SiO₂ thickness we achieved had an experimental deviation of 4.5% with 2.00 nm uncertainty. The value complex refractive index of Gold and Tantalum measured agrees with the different values found in several references. The uncertainty values were found to be mostly limited by the polarimeter’s uncertainty.

Citation Download Citation

F. Velosa and M. Abreu "Low cost ellipsometer using a standard commercial polarimeter", Proc. SPIE 10453, Third International Conference on Applications of Optics and Photonics, 1045305 (22 August 2017); https://doi.org/10.1117/12.2271144

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