Moore's law, lithography, and how optics drive the semiconductor industry

G. Dan Hutcheson

doi:10.1117/12.2308299

19 March 2018 Moore's law, lithography, and how optics drive the semiconductor industry

G. Dan Hutcheson

Author Affiliations +

Proceedings Volume 10583, Extreme Ultraviolet (EUV) Lithography IX; 1058303 (2018) https://doi.org/10.1117/12.2308299
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

When the subject of Moore's Law arises, the important role that lithography plays and how advances in optics have made it all possible is seldom brought up in the world outside of lithography itself. When lithography is mentioned up in the value chain, it’s often a critique of how advances are coming too slow and getting far too expensive. Yet advances in lithography are at the core of how Moore’s Law is viable. This presentation lays out how technology and the economics of optics in manufacturing interleave to drive the immense value that semiconductors have brought to the world by making it smarter. Continuing these advances will be critical as electronics make the move from smart to cognitive.

Citation Download Citation

G. Dan Hutcheson "Moore's law, lithography, and how optics drive the semiconductor industry", Proc. SPIE 10583, Extreme Ultraviolet (EUV) Lithography IX, 1058303 (19 March 2018); https://doi.org/10.1117/12.2308299

ACCESS THE FULL ARTICLE

PROCEEDINGS
14 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY