Paper
27 November 2017 Wave aberration tolerance for the optical design of a laser Fizeau interferometer
Author Affiliations +
Proceedings Volume 10590, International Optical Design Conference 2017; 105900L (2017) https://doi.org/10.1117/12.2291684
Event: International Optical Design Conference - IODC 2017, 2017, Denver, United States
Abstract
This paper concerns a numerical technique for evaluating effect of wave aberration on the frequency response of a laser Fizeau interferometer. The frequency response is described by Coherent Phase Transfer Function, which is defined as the Fourier transform of the phase of the complex image of a phase object formed by the interferometer normalized to the Fourier transform of the phase object itself. Based on the results of the study an aberration tolerance criterion of 1/8-wave P-V is proposed for the optical design of a laser Fizeau interferometer.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shiguang Wang "Wave aberration tolerance for the optical design of a laser Fizeau interferometer ", Proc. SPIE 10590, International Optical Design Conference 2017, 105900L (27 November 2017); https://doi.org/10.1117/12.2291684
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KEYWORDS
Optical design

Optical transfer functions

Fizeau interferometers

Interferometry

Metrology

Tolerancing

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