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1 December 2017 Thin films structural properties: results of the full-atomistic supercomputer simulation
F. V. Grigoriev, V. B. Sulimov, A. V. Tikhonravov
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Proceedings Volume 10603, Photonics, Devices, and Systems VII; 106030F (2017) https://doi.org/10.1117/12.2292420
Event: Photonics Prague 2017, 2017, Prague, Czech Republic
Abstract
The previously developed full-atomistic approach to the thin film growth simulation is applied for the investigation of the dependence of silicon dioxide films properties on deposition conditions. It is shown that the surface roughness and porosity are essentially reduced with the growth of energy of deposited silicon atoms. The growth of energy from 0.1 eV to 10 eV results in the increase of the film density for 0.2 - 0.4 g/cm3 and of the refractive index for 0.04-0.08. The compressive stress in films structures is observed for all deposition conditions. Absolute values of the stress tensor components increase with the growth of e energy of deposited atoms. The increase of the substrate temperature results in smoothing of the density profiles of the deposited films.
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F. V. Grigoriev, V. B. Sulimov, and A. V. Tikhonravov "Thin films structural properties: results of the full-atomistic supercomputer simulation", Proc. SPIE 10603, Photonics, Devices, and Systems VII, 106030F (1 December 2017); https://doi.org/10.1117/12.2292420
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KEYWORDS
Silica
Deposition processes
Thin film growth
Thin films
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