Silicon-nitride biophotonic sensing platform

D. H. Geuzebroek; G. A. J. Besselink; F. Schreuder; F. Falke; A. Leinse; R. G. Heideman

doi:10.1117/12.2507854

4 March 2019 Silicon-nitride biophotonic sensing platform

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman

Proceedings Volume 10921, Integrated Optics: Devices, Materials, and Technologies XXIII; 1092117 (2019) https://doi.org/10.1117/12.2507854
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Silicon-Nitride based Photonic Integrated Circuits (PICs) broaden the application scope of PICs outside of telecommunications where it originated from, since the wavelength range over which a waveguide can be designed matches for instance biophotonic applications usually working in the VIS (400-700nm) and NIR (700-1000nm) range. In this paper we show the latest results our silicon-nitride based sensor platform, that consist of an array of several types of interferometric sensors (Microring resonators, Mach-Zehnder interferometers), that are either used as refractive index, absorption or fluorescence sensors. We show the trade-offs between the different sensor types and show why an asymmetric MZI improves the sensitivity of the sensor platform over the MRR with over a factor of 10 down to the 10^-8RIU level. Furthermore we show that using flip-chipped VCSELs as integrated light source a low cost, disposable device is made. For desktop purposes we show how light sources are fiber coupled to the sensing platform creating a high end measurement system. The complete readout system allows for measuring multiple sensors on the chip, enabling multi-analyte measurements as well as improve the total stability of the measurement platform by using on-chip references. Finally we show an overview of measurement results where the sensor platform is functionalized using different interaction layers both local as well as wafer- scale. The results that the sensor platform can be used in for example liquid (blood and saliva) analysis as well as bacteria detection. The platform can be extended with a microfluidic interface for interaction of the optical layer and fluidics. An added integrated on-chip spectrometer allow additional functionality to the presented sensing platform.

Conference Presentation

Citation Download Citation

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, and R. G. Heideman "Silicon-nitride biophotonic sensing platform", Proc. SPIE 10921, Integrated Optics: Devices, Materials, and Technologies XXIII, 1092117 (4 March 2019); https://doi.org/10.1117/12.2507854

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