Doubly-clamped pre-stressed silicon nitride string resonators excel as high Q nanomechanical systems enabling room temperature quality factors of several 100,000 in the 10 MHz eigenfrequency range. Dielectric transduction ideally complements the silicon nitride strings, providing an all-electrical control scheme while retaining the large mechanical quality factor [1,2]. It is mediated by an inhomogeneous electric field created between adjacent electrodes. The resulting gradient field provides an integrated platform for actuation, displacement detection, frequency tuning as well as strong mode.
Dielectrically controlled silicon nitride strings are an ideal testbed to explore a variety of dynamical phenomena ranging from multimode coupling to coherent control. Here I will focus on the nonlinear dynamics of a strongly driven string [3,4]. While the response of the string is described by the cubic nonlinearity of the well-established Duffing model, the power spectrum reveals a series of interesting satellite peaks. I will show how they reflect the dynamics of the driven string in the presence of thermal noise, enabling insights into the squeezing of thermal fluctuations as well as nonlinear switching phenomena.
[1] Q. P. Unterreithmeier et al., Nature 458, 1001 (2009).
[2] J. Rieger et al., Appl. Phys. Lett. 101, 103110 (2012).
[3] M. Seitner et al., Phys. Rev. Lett. 118, 254301 (2017).
[4] J. Huber et al., in preparation
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