New generation of the miniature bimorph mirrors for compensation of the wavefront distortions

Vladimir Toporovsky; Alexis Kudryashov; Vadim Samarkin; Julia Sheldakova; Alexey Rukosuev; Arkadiy Skvortsov; Danila Pshonkin

doi:10.1117/12.2510104

4 March 2019 New generation of the miniature bimorph mirrors for compensation of the wavefront distortions

Vladimir Toporovsky, Alexis Kudryashov, Vadim Samarkin, Julia Sheldakova, Alexey Rukosuev, Arkadiy Skvortsov, Danila Pshonkin

Author Affiliations +

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310O (2019) https://doi.org/10.1117/12.2510104
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

As it is well-known, the laser radiation, propagated through different mediums, is affected by wavefront distortions and thus the quality of the radiation is significantly decreased. To compensate for the wavefront aberrations adaptive optics means are used. We developed miniature bimorph mirror with 37 electrodes. To manufacture this type of mirrors two technologies were used. Those are laser engraving technology for drawing electrode grid on the piezoceramic disc, and ultrasonic welding technology to connect wires to the control electrodes. Main parameters of such a deformable mirror were investigated and presented in this paper.

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Vladimir Toporovsky, Alexis Kudryashov, Vadim Samarkin, Julia Sheldakova, Alexey Rukosuev, Arkadiy Skvortsov, and Danila Pshonkin "New generation of the miniature bimorph mirrors for compensation of the wavefront distortions", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310O (4 March 2019); https://doi.org/10.1117/12.2510104

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