Development of sub-10µm pitch HgCdTe infrared detectors

J. Abergel; F. Rochette; S. Gout; X. Baudry; C. Grangier; A. Even; J.-L. Santailler; D. Giotta; R. Obrecht; T. Pellerin; L. Bonnefond; J. Rothman; S. Bisotto

doi:10.1117/12.2520030

7 May 2019 Development of sub-10μm pitch HgCdTe infrared detectors

J. Abergel, F. Rochette, S. Gout, X. Baudry, C. Grangier, A. Even, J.-L. Santailler, D. Giotta, R. Obrecht, T. Pellerin, L. Bonnefond, J. Rothman, S. Bisotto

Author Affiliations +

Proceedings Volume 11002, Infrared Technology and Applications XLV; 1100222 (2019) https://doi.org/10.1117/12.2520030
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

This LETI/Sofradir/Defir study aims at realizing sub-10 μm pitch HgCdTe infrared FPAs. To cope with the different diode process issues related to pitch reduction-morphologic realization, short-circuits, FTM optimization - a parametric study was carried out - contact size, passivation properties, doping levels, diode processing conditions-. A wafer-level test campaign was conducted to evaluate the process window. It revealed functional MWIR diodes from 15 μm to 3 μm pitch. 7.5 μm pitch 640×512 and 5 μm pitch 64×152 FPA were characterized and turned out to be functional.

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J. Abergel, F. Rochette, S. Gout, X. Baudry, C. Grangier, A. Even, J.-L. Santailler, D. Giotta, R. Obrecht, T. Pellerin, L. Bonnefond, J. Rothman, and S. Bisotto "Development of sub-10μm pitch HgCdTe infrared detectors", Proc. SPIE 11002, Infrared Technology and Applications XLV, 1100222 (7 May 2019); https://doi.org/10.1117/12.2520030

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