Modelling of direct laser writing in multilayer absorbing medium

Anton Saetchnikov; Elina Tcherniavskaia; Vladimir Saetchnikov; Andreas Ostendorf

doi:10.1117/12.2525730

21 June 2019 Modelling of direct laser writing in multilayer absorbing medium

Anton Saetchnikov, Elina Tcherniavskaia, Vladimir Saetchnikov, Andreas Ostendorf

Proceedings Volume 11057, Modeling Aspects in Optical Metrology VII; 110571B (2019) https://doi.org/10.1117/12.2525730
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

A model that describes polymerization unit formation in multilayer absorbing medium for direct laser writing has been proposed. Properties of separate layers including surface roughness, illumination geometry, pulsed laser source and photosensitive material are parameters of the discussed model. A set of simulations has been carried out where the influence of the refractive indexes relation, layer thickness, roughness of the particular layers with respect to the structuring depth on the structure-model match and reproducibility has been analysed and discussed.

Citation Download Citation

Anton Saetchnikov, Elina Tcherniavskaia, Vladimir Saetchnikov, and Andreas Ostendorf "Modelling of direct laser writing in multilayer absorbing medium", Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 110571B (21 June 2019); https://doi.org/10.1117/12.2525730

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