Design and fabrication of antireflective surface microstructures on lithium triborate

Yong Sun; Fanyu Kong; Yunxia Jin; Yonglu Wang; Yibin Zhang; Hongchao Cao; Hongbo He

doi:10.1117/12.2540603

8 July 2019 Design and fabrication of antireflective surface microstructures on lithium triborate

Yong Sun, Fanyu Kong, Yunxia Jin, Yonglu Wang, Yibin Zhang, Hongchao Cao, Hongbo He

Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640M (2019) https://doi.org/10.1117/12.2540603
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

This work aims to design and fabricate sub-wavelength structures on lithium triborate surface for increasing its transmittance at 1064 nm. The finite-difference time-domain (FDTD) method is used to discuss the effects of subwavelength structure parameters such as period, depth, duty cycle and shape factor on the reflectivity. The subwavelength surface microstructures are fabricated by interference lithography technique and reactive ion beam etching method. The transmittance of the lithium triborate with single-side sub-wavelength structures is measured by UVvisible- near-infrared spectrophotometer. The results show that the transmittance of the sample with single-side microstructures at 1064 nm is about 4% higher than that of the polished substrate.

Citation Download Citation

Yong Sun, Fanyu Kong, Yunxia Jin, Yonglu Wang, Yibin Zhang, Hongchao Cao, and Hongbo He "Design and fabrication of antireflective surface microstructures on lithium triborate", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640M (8 July 2019); https://doi.org/10.1117/12.2540603

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