Ultrathin and lightweight lobster eye optics formed into a single flat substrate

K. Doi; K. Nomoto; Y. Nawaki; K. Uetsuki; R. Hata; K. Tsuruoka; H. Kodaka; H. Ito; Y. Harada; Y. Asakawa

doi:10.1117/12.2527945

9 September 2019 Ultrathin and lightweight lobster eye optics formed into a single flat substrate

K. Doi, K. Nomoto, Y. Nawaki, K. Uetsuki, R. Hata, K. Tsuruoka, H. Kodaka, H. Ito, Y. Harada, Y. Asakawa

Proceedings Volume 11108, Advances in X-Ray/EUV Optics and Components XIV; 111080V (2019) https://doi.org/10.1117/12.2527945
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

We have been developing a compact and lightweight X-ray micropore optics for small satellite mounting. We achieved three-dimensional machining into a single flat glass substrate by femtosecond laser irradiation and wet etching. In addition to the three-dimensional machining, we applied annealing and magnetic fluid polishing to reduce surface roughness of inner walls, and coated the surface with Pt layer by ALD to improve the reflectance. In this paper, we introduce our achievement on micromachining into a single flat glass substrate. As principle verification, we achieved extremely small hole with 2μm diameter and 100μm depth, slit with 10μm width, 2500(50×50) multiple through holes in 26μm pitch and hole angle control within 0.15 degree. We will further develop manufacturing techniques and explore other applications of our micropore optics, such as fundamental research, security inspection and infrastructure inspection.

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K. Doi, K. Nomoto, Y. Nawaki, K. Uetsuki, R. Hata, K. Tsuruoka, H. Kodaka, H. Ito, Y. Harada, and Y. Asakawa "Ultrathin and lightweight lobster eye optics formed into a single flat substrate", Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 111080V (9 September 2019); https://doi.org/10.1117/12.2527945

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KEYWORDS

X-rays

Annealing

Magnetism

Optics manufacturing

X-ray optics

Glasses

Manufacturing

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