Installation and commissioning of the silicon pore optics coating facility for the ATHENA mission

S. Massahi; F. E. Christensen; D. D. M. Ferreira; A. Jafari; S. Svendsen; P. L. Henriksen; B. Shortt; I. Ferreira; M. Bavdaz; M. Collon; B. Landgraf; D. Girou; A. Langer; W. Schönberger; T. Wellner; M. Krumrey; L. Cibik

doi:10.1117/12.2528351

9 September 2019 Installation and commissioning of the silicon pore optics coating facility for the ATHENA mission

S. Massahi, F. E. Christensen, D. D. M. Ferreira, A. Jafari, S. Svendsen, P. L. Henriksen, B. Shortt, I. Ferreira, M. Bavdaz, M. Collon, B. Landgraf, D. Girou, A. Langer, W. Schönberger, T. Wellner, M. Krumrey, L. Cibik

Author Affiliations +

Proceedings Volume 11119, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX; 111190F (2019) https://doi.org/10.1117/12.2528351
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

We present the latest progress on the industrial scale coating facility for the Advanced Telescope for High-ENergy Astrophysics (ATHENA) mission. The facility has been successfully commissioned and tested, completing an important milestone in preparation of the Silicon Pore Optics (SPO) production capability. We qualified the coating facility by depositing iridium and boron carbide thin films in different configurations under various process conditions including pre-coating in-system plasma cleaning. The thin films were characterized with X-Ray Reectometry (XRR) using laboratory X-ray sources Cu K-α at 8.048 keV and PTB's four-crystal monochromator beamline at the synchrotron radiation facility BESSY II in the energy range from 3.6 keV to 10.0 keV. Additional X-ray Photoelectron Spectroscopy (XPS) measurements were performed with Al K-α radiation to analyze the composition of the deposited thin films.

Conference Presentation

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S. Massahi, F. E. Christensen, D. D. M. Ferreira, A. Jafari, S. Svendsen, P. L. Henriksen, B. Shortt, I. Ferreira, M. Bavdaz, M. Collon, B. Landgraf, D. Girou, A. Langer, W. Schönberger, T. Wellner, M. Krumrey, and L. Cibik "Installation and commissioning of the silicon pore optics coating facility for the ATHENA mission", Proc. SPIE 11119, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX, 111190F (9 September 2019); https://doi.org/10.1117/12.2528351

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