Paper
25 February 2020 Nanostructured light-emitting diodes through 3D mold
Je Won Kim
Author Affiliations +
Abstract
The nanorod structure will be made by way of producing three-dimensional nano-molding process applied with a patterning and deep-etching process differentiated from the existing nano structure formation. Nano-molding process in this study enables the uniform and reproducible nano structure. For the three-dimensional structure, wavelength can be changed through the spacing of nanorods. In this way, multiple wavelengths in one device can be accomplished through the different way from the two-dimensional structure. In addition, when the light-emitting layer is grown on the side of the nanorod, the nonpolar nitride can be grown on the m-crystal plane rather than on the c-crystal plane. The formation of the light-emitting layer based on the nonpolar nitride can suppress the polarization effect generated in the nitride of the polarity, and thus it is expected that the recombination of electrons and holes can be strengthened.
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Je Won Kim "Nanostructured light-emitting diodes through 3D mold", Proc. SPIE 11302, Light-Emitting Devices, Materials, and Applications XXIV, 113020H (25 February 2020); https://doi.org/10.1117/12.2544643
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KEYWORDS
Nanorods

Etching

Indium

Nanolithography

Nanostructures

Oxides

Gallium nitride

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