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18 December 2019 Research on multi-grating angle measuring sensor system
Wenying Zhang, Haoran Zhu, Ming Guo, Meixuan Li, Siqi Zhang
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Proceedings Volume 11338, AOPC 2019: Optical Sensing and Imaging Technology; 1133822 (2019) https://doi.org/10.1117/12.2546929
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China
Abstract
Angle measurement is the basic problem of mechanical testing theory and technology. High-precision angle measuring sensor is the core component that is irreplaceable for scientific research, advanced manufacturing and test measurement. In this paper, for the long-term technical problems of difficult to suppress the shaft axis error of the circular grating angle measuring sensor, the size and precision are difficult to reconcile, a new concept of multi-grating angle measuring sensor is proposed, and the error of the sensor itself, installation error, electronic subdivision error, and multi-grating measurement are studied. The angle sensor suppresses the shafting error and establishes a simulation model. A multi-grating angle measuring sensor experimental system was built. The experimental results show that the angle error of the multi-grating angle measuring sensor is 134.32"". The proposal of multi-grating angle measuring sensor provides a new way for mechanical angle measurement theory and method.
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Wenying Zhang, Haoran Zhu, Ming Guo, Meixuan Li, and Siqi Zhang "Research on multi-grating angle measuring sensor system", Proc. SPIE 11338, AOPC 2019: Optical Sensing and Imaging Technology, 1133822 (18 December 2019); https://doi.org/10.1117/12.2546929
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KEYWORDS
Sensors
Error analysis
Manufacturing
Moire patterns
Scientific research
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