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Three dimensional (3D) topology data obtained from different optical metrology techniques tend to produce local disagreements which may yield incorrect judgement from inspectors especially under scenarios of precision metrology. This research explores statistical methods to provide a functional scoring for similarities. The investigation is conducted using two statistical methods (Pearsons correlation coefficient and image distance), two optical techniques (structured light and focus variation microscopy) and two application scenarios (metal additive printing and ballistic forensic examination). Experimental results show the promise of using statistical tools to assist binary decisions for matching/non-matching even if 3D topology data are obtained from different optical techniques.
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