Recent Developments In Growth And Characterization Of Thin Diamond Films

R. W. Pryor; R. L. Thomas; P. K. Kuo; L. D. Favro

doi:10.1117/12.962063

15 January 1989 Recent Developments In Growth And Characterization Of Thin Diamond Films

R. W. Pryor, R. L. Thomas, P. K. Kuo, L. D. Favro

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962063
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Many different process and deposition equipment technologies have been developed worldwide for the deposition of thin diamond films. The diamond films that result from these technologies are, in general, polycrystalline and differ primarily in nucleation density, growth rate, crystallite size, non-diamond carbon content, etc. This paper reviews, briefly, the primary technologies and their resulting films. The primary focus of this paper is, however, the presentation of a methodology for the determination of the relative quality of diamond materials, both bulk and film. The methodology presented utilizes a combination of measurements from the mirage effect (Thermal Wave Technique) and the raman effect. This paper reviews, briefly, both techniques and their resulting data. Results are presented that show an excellent correlation between the thermal diffusivity and the graphitic content of thin diamond films.

Citation Download Citation

R. W. Pryor, R. L. Thomas, P. K. Kuo, and L. D. Favro "Recent Developments In Growth And Characterization Of Thin Diamond Films", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962063

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