Investigation of waveguide modes in EUV mask absorbers

Hazem Mesilhy; Peter Evanschitzky; Gerardo Bottiglieri; Claire van Lare; Eelco van Setten; Andreas Erdmann

doi:10.1117/12.2587948

22 February 2021 Investigation of waveguide modes in EUV mask absorbers

Hazem Mesilhy, Peter Evanschitzky, Gerardo Bottiglieri, Claire van Lare, Eelco van Setten, Andreas Erdmann

Proceedings Volume 11609, Extreme Ultraviolet (EUV) Lithography XII; 116090E (2021) https://doi.org/10.1117/12.2587948
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

We propose and prove an alternative view of patterns on the EUV mask absorber as waveguides. The geometrical similarities between waveguides and EUV mask after stripping out the multilayer is shown. The waveguiding effect inside the EUV mask absorber is demonstrated by comparing rigorous RCWA (rigorous coupled-wave analysis) to the waveguide analytical solution. Our investigations of the near field of EUV mask demonstrate that waveguide effects dominate transmission of light through openings in the absorber of EUV masks. This perspective of the EUV mask is not to provide a model that explains all phenomena in EUV imaging scenarios or to propose other absorber materials. Instead, the proposed waveguide perspective of EUV masks helps to understand the root causes of certain far field and imaging characteristics of EUV masks.

Conference Presentation

Citation Download Citation

Hazem Mesilhy, Peter Evanschitzky, Gerardo Bottiglieri, Claire van Lare, Eelco van Setten, and Andreas Erdmann "Investigation of waveguide modes in EUV mask absorbers", Proc. SPIE 11609, Extreme Ultraviolet (EUV) Lithography XII, 116090E (22 February 2021); https://doi.org/10.1117/12.2587948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available