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5 March 2021 Monolithic focusing metasurfaces
Maryna L. Meretska, Soon Wei Daniel Lim, Federico Capasso
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Proceedings Volume 11695, High Contrast Metastructures X; 1169509 (2021) https://doi.org/10.1117/12.2577320
Event: SPIE OPTO, 2021, Online Only
Abstract
All-dielectric focusing metasurfaces have attracted a lot of attention in recent years because of their lightweight, superior performance, and compact form factor. Traditionally, metasurfaces are fabricated from dielectric material shaped into pillar-like structures. Pillars are fragile and tend to fall, especially for high aspect ratio structures. We have developed and characterized a monolithic metasurface in the infrared spectral range. The monolithic design of realized metasurfaces allows for the creation of rugged structures that can withstand harsh cleaning and handling, while maintaining good focusing performance. This metasurface platform thus widens the range of practical applications for metalenses.
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Maryna L. Meretska, Soon Wei Daniel Lim, and Federico Capasso "Monolithic focusing metasurfaces", Proc. SPIE 11695, High Contrast Metastructures X, 1169509 (5 March 2021); https://doi.org/10.1117/12.2577320
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KEYWORDS
Phase shift keying
Silicon
Crystals
Dielectrics
Fabry–Perot interferometers
Infrared radiation
Lens design
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