Gravity-compensated and miniaturized optofluidic wavefront modulator

Martin Sauther; Pouya Rajaeipour; Nitish Satya Murthy; Kaustubh Banerjee; Hans Zappe; Çağlar Ataman

doi:10.1117/12.2581941

5 March 2021 Gravity-compensated and miniaturized optofluidic wavefront modulator

Martin Sauther, Pouya Rajaeipour, Nitish Satya Murthy, Kaustubh Banerjee, Hans Zappe, Çağlar Ataman

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970L (2021) https://doi.org/10.1117/12.2581941
Event: SPIE OPTO, 2021, Online Only

Abstract

We report a new optofluidic transmissive wavefront modulator optimized for gravity-neutral performance and miniaturized dimensions. The modulator is optimized for compensating gravity-induced aberrations by simulating its behavior with various design configurations. Miniaturization was achieved by a novel method for liquid filling and sealing of the modulator. Key elements of the new interface are intra-substrate channels fabricated by a selective laser-induced etching process. The modulator has a final thickness of 750 µm and can be operated in any orientation without significant loss of modulation quality.

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Citation Download Citation

Martin Sauther, Pouya Rajaeipour, Nitish Satya Murthy, Kaustubh Banerjee, Hans Zappe, and Çağlar Ataman "Gravity-compensated and miniaturized optofluidic wavefront modulator", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970L (5 March 2021); https://doi.org/10.1117/12.2581941

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