Gallium oxide based power and RF device technologies

Uttam Singisetti; Shivam Sharma; Ke Zeng; Abhishek Vaidya; Sudipto Saha; Avinash Kumar; Ankit Sharma

doi:10.1117/12.2587885

12 April 2021 Gallium oxide based power and RF device technologies

Uttam Singisetti, Shivam Sharma, Ke Zeng, Abhishek Vaidya, Sudipto Saha, Avinash Kumar, Ankit Sharma

Proceedings Volume 11742, Radar Sensor Technology XXV; 117420V (2021) https://doi.org/10.1117/12.2587885
Event: SPIE Defense + Commercial Sensing, 2021, Online Only

Abstract

Beta-Ga₂O₃ has emerged as a promising ultra-wide-bandgap semiconductor system for next generation power, and RF applications. In this talk, we will present our recent results on gallium oxide based high breakdown voltage MOSFETs and scaled gate length RF devices. The large bandgap of Ga₂O₃ leads to a high critical field strength. This high field strength in combination with high room temperature mobility and calculated electron velocity leads to a higher Baliga’s Figure of Merit (BFoM) and Johnston Figure of Merit (JFoM) than commercial widebandgap technologies. Additionally, the large bandgap also enables high temperature operation and radiation hardness making it attractive for harsh environment applications. We will present our work on the lateral MOSFETs with improved field plate design which show record high breakdown voltages. DC and pulsed I-V characteristics of 100 nm gate length Ga₂O₃ MOSFET will be reported. DC-RF dispersion and passivation technology will be discussed.

Conference Presentation

Citation Download Citation

Uttam Singisetti, Shivam Sharma, Ke Zeng, Abhishek Vaidya, Sudipto Saha, Avinash Kumar, and Ankit Sharma "Gallium oxide based power and RF device technologies", Proc. SPIE 11742, Radar Sensor Technology XXV, 117420V (12 April 2021); https://doi.org/10.1117/12.2587885

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available