Measurement of angular displacement by compact mechanical structure based on laser interference system

Jin Zhou; Sen Zhou; Jian Xu; Lei Tao; Xiaoli Wu

doi:10.1117/12.2587271

12 March 2021 Measurement of angular displacement by compact mechanical structure based on laser interference system

Jin Zhou, Sen Zhou, Jian Xu, Lei Tao, Xiaoli Wu

Proceedings Volume 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications; 117635R (2021) https://doi.org/10.1117/12.2587271
Event: Seventh Symposium on Novel Photoelectronic Detection Technology and Application 2020, 2020, Kunming, China

Abstract

Laser interference system has been extensively applied in high-precision geometric metrology benefit from the advantages of high accuracy, high resolution and stability in linear displacement measurement. In this paper, we present a novel and compact mechanical structure to realize the conversion between angular and linear displacement, so that the slight angular displacement can be enlarged and obtained by using the characteristics of high-precision linear displacement measurement of laser interference system. A series of experiments are carried out on this device, the conversion ratio of angular and linear displacement we achieved is 5.76 arcsec/ μm, which is determined by the transmission ratio of the worm gear pair and the pitch of the ball screw. By comparing the measured angular values with 23 reference values distributed on the whole circumference, the maximum original error of angular displacement measurement in this system without correction or compensation is ± 25 arcsec and the resolution is 0.6 arcsec.

Citation Download Citation

Jin Zhou, Sen Zhou, Jian Xu, Lei Tao, and Xiaoli Wu "Measurement of angular displacement by compact mechanical structure based on laser interference system", Proc. SPIE 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications, 117635R (12 March 2021); https://doi.org/10.1117/12.2587271

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available