Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change

Xiangnan Jin; Chenyu Wang; Jia Shen; Wei Liu; Ziren Luo; Yu Niu

doi:10.1117/12.2591323

28 February 2021 Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change

Xiangnan Jin, Chenyu Wang, Jia Shen, Wei Liu, Ziren Luo, Yu Niu

Author Affiliations +

Proceedings Volume 11781, 4th Optics Young Scientist Summit (OYSS 2020); 117811I (2021) https://doi.org/10.1117/12.2591323
Event: Optics Frontier: Optics Young Scientist Summit, 2020, Ningbo, China

Abstract

Total internal reflection imaging ellipsometry (TIRIE) is widely used in the field of the biological detection due to its high sensitivity and multi-detection capability. Traditionally, the ellipsometric measurement works under the null-off null condition which is insensitive to the small interface variations such as the electron density disturbance at the sensing surface. Thus, we analyze the response of the detected signals under the different working conditions to the ellipsometric parameter variations and optimize the polarization settings to further enhance the TIRIE response to the subtle interface variation in this paper. Furthermore, the relationship between the detected signal and the electron density disturbance is obtained, and the result shows that the detection sensitivity for the subtle interface changes is improved by one hundred times under the optimized working condition.

Citation Download Citation

Xiangnan Jin, Chenyu Wang, Jia Shen, Wei Liu, Ziren Luo, and Yu Niu "Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change", Proc. SPIE 11781, 4th Optics Young Scientist Summit (OYSS 2020), 117811I (28 February 2021); https://doi.org/10.1117/12.2591323

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