Surface roughness measurement using the generalized Harvey-Shack scattering theory and the K-correlation model

Yoshitaka Igarashi; Toshiyasu Mitsunari; Kazunori Yamazaki

doi:10.1117/12.2592020

20 June 2021 Surface roughness measurement using the generalized Harvey-Shack scattering theory and the K-correlation model

Yoshitaka Igarashi, Toshiyasu Mitsunari, Kazunori Yamazaki

Author Affiliations +

Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII; 117821S (2021) https://doi.org/10.1117/12.2592020
Event: SPIE Optical Metrology, 2021, Online Only

Conference Poster

Abstract

Optical non-contact surface texture measurement is of great value in terms of high speed and non-invasiveness. The purpose of this study is to obtain accurate surface roughness information using an optical non-contact method. We propose a new method to accurately acquire the surface roughness parameter with the scattered light intensity distribution. The roughness parameter Rq was determined using the generalized Harvey-Shack (GHS) theory. Furthermore, the roughness parameter R▵q was estimated from the argument ”a” of the K-correlation model. The results using the proposed non-contact method were in good agreement with the conventional contact method in most cases.

Conference Presentation

Citation Download Citation

Yoshitaka Igarashi, Toshiyasu Mitsunari, and Kazunori Yamazaki "Surface roughness measurement using the generalized Harvey-Shack scattering theory and the K-correlation model", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117821S (20 June 2021); https://doi.org/10.1117/12.2592020

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