Measurements with a capacitance gauge for sub-nanometer thermal expansion characterization of optical components

Kevin Harding

doi:10.1117/12.2593533

5 August 2021 Measurements with a capacitance gauge for sub-nanometer thermal expansion characterization of optical components

Kevin Harding

Author Affiliations +

Proceedings Volume 11817, Applied Optical Metrology IV; 1181702 (2021) https://doi.org/10.1117/12.2593533
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

The ability to measure small thermal expansion of precision components can be critical to the performance of precision instruments such as optical telescopes. The methods available to measure nanometer and sub-nanometer dimensional changes on optical elements is very limited. This white paper explores the ability of the capacitance gauge to measure expansion of optical elements in the sub-nanometer range.

Conference Presentation

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Kevin Harding "Measurements with a capacitance gauge for sub-nanometer thermal expansion characterization of optical components", Proc. SPIE 11817, Applied Optical Metrology IV, 1181702 (5 August 2021); https://doi.org/10.1117/12.2593533

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