An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Jie Qi; Chenguang Xin

doi:10.1117/12.2600368

9 October 2021 An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Jie Qi, Chenguang Xin

Author Affiliations +

Proceedings Volume 11898, Holography, Diffractive Optics, and Applications XI; 118981K (2021) https://doi.org/10.1117/12.2600368
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Benefitting from properties including high sensitivity, high resolution, immunity to electromagnetic interference and remote sensing ability, optical-grating-based displacement measuring technologies have been widely used in many fields such as semiconductor manufacturing, precision machining, microscopic techniques and photolithography recently. In this work, high-resolution displacement measuring is demonstrated with an ultracompact structure consist of only a few optical components by using self-interference effect of a single nanograting. The resolution is demonstrated to be as low as 0.1-nm level. This method shows great potential in developing miniaturized high-resolution displacement devices and systems, which are highly demanded for future integrated high-precision machinery manufacturing systems.

Conference Presentation

Citation Download Citation

Jie Qi and Chenguang Xin "An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting", Proc. SPIE 11898, Holography, Diffractive Optics, and Applications XI, 118981K (9 October 2021); https://doi.org/10.1117/12.2600368

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