Identification of aliasing effects in measurements of unknown MTFs

Markus Schake; Michael Schulz

doi:10.1117/12.2601176

9 October 2021 Identification of aliasing effects in measurements of unknown MTFs

Markus Schake, Michael Schulz

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118990H (2021) https://doi.org/10.1117/12.2601176
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

This contribution presents simulation and measurement results considering the identification and preclusion of aliasing effects in Modulation Transfer Function (MTF) measurements of unknown specimens. An adaptation of the commonly applied slanted edge algorithm is employed to retrieve the MTF from tilted Line Spread Function (LSF) images, which are recorded for different microscope objective magnifications and tilt angles. Measurement results demonstrate the capability of the slanted slit oversampling technique to detect and resolve aliasing issues. The variation of magnification objectives, tilt angle, binning value, camera detector and evaluation algorithm reveals systematic MTF error contributions due to these parameters.

Conference Presentation

Citation Download Citation

Markus Schake and Michael Schulz "Identification of aliasing effects in measurements of unknown MTFs", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118990H (9 October 2021); https://doi.org/10.1117/12.2601176

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