High Q-factor fano resonances driven by quasi bound state in the continuum based on all-dielectric metasurface

Ziang Gao; Shilin Yu; Yusen Wang; Tonggang Zhao

doi:10.1117/12.2601907

9 October 2021 High Q-factor fano resonances driven by quasi bound state in the continuum based on all-dielectric metasurface

Ziang Gao, Shilin Yu, Yusen Wang, Tonggang Zhao

Author Affiliations +

Proceedings Volume 11903, Nanophotonics and Micro/Nano Optics VII; 1190317 (2021) https://doi.org/10.1117/12.2601907
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Fano resonance with high Q-factor based on all-dielectric metasurface is of great significance for the design of optical refractive index sensor. Herein, we proposed an all-dielectric metasurface structure based on silicon, which is composed of two circular holes and one hexagonal hole. The substrate is silica. Two schemes are put forward to achieve asymmetry structure: changing the radius of a circular hole and changing the circular hole into an elliptical hole. Both schemes can generate quasi-BIC mode. The transmission spectrum is calculated by finite difference time domain (FDTD) simulation software, and the maximum Q-factor can exceed 24000. Finally, the extremely narrow linewidth of Fano resonance is utilized to design the optical refractive index sensors, yielding the sensitivity of 273nm / RIU and figure of merit (FOM) of 2730.

Citation Download Citation

Ziang Gao, Shilin Yu, Yusen Wang, and Tonggang Zhao "High Q-factor fano resonances driven by quasi bound state in the continuum based on all-dielectric metasurface", Proc. SPIE 11903, Nanophotonics and Micro/Nano Optics VII, 1190317 (9 October 2021); https://doi.org/10.1117/12.2601907

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